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Tronics Delivered Its Millionth High-Performance Inertial MEMS Sensor
Date:9/3/2013

Grenoble, France, and Dallas, TX, USA (PRWEB) September 03, 2013

High-performance inertial MEMS has been one of Tronics key businesses for about 15 years. The company is knowledgeable in all aspects of the sensor products from MEMS design to MEMS manufacturing, through ASIC integration, packaging, test and calibration. It has recently passed the meaningful mark of one million high-performance sensors delivered. These products were primarily high-performance accelerometers and gyroscopes.

Designing and manufacturing such products require know-how that is significantly different from that needed for lower performance products, such as consumer accelerometers and gyroscopes. The key technologies that have allowed Tronics’ success in this field are the use of thick SOI, well-controlled high-aspect ratio DRIE, as well as high vacuum and low stress packaging.

In addition to the principal technological elements, manufacturing high-performance inertial MEMS requires solid experience in the following challenging activities: keeping tight control of all process steps with the ability to fully understand the failure modes down to the root causes, achieving good yields with a relatively low number of wafers processed, ensuring 100-percent individual component traceability on all tests performed, gathering significant reliability and stability data, and mastering the use of high-performance characterization tools.

One million units delivered is a significant milestone, not only because the typical sales price is somewhere between several tens of dollars to several hundreds of dolla
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