Navigation Links
MEMS Materials and Processes Handbook -- a comprehensive, practical resource
Date:4/6/2011

Academic and industrial research scientists and engineers, as well as students working in micro-electromechanical systems (MEMS), commonly encounter a steep learning curve when developing common MEMS fabrication processes. A fundamental, comprehensive MEMS-focused reference book just published by Springer promises to be an important game-changing asset for the field.

The new MEMS Materials and Processes Handbook is an exhaustive design reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. It will be valuable for seasoned researchers and engineers as well as students and other newcomers working in MEMS and materials processing.

The handbook is co-edited by Reza Ghodssi, Director of the Institute for Systems Research and Herbert Rabin Distinguished Professor in the Department of Electrical and Computer Engineering at the University of Maryland, College Park, Md.; and Pinyen Lin, Chief Technologist and Vice President of Business Development, Touch Micro-System Technology Corp. Taoyuan, Taiwan. It features 35 international contributing authors who are MEMS leaders in academic, industrial and government laboratory settings.

The handbook's content is separated into two distinct sections on materials and processes (fabrication techniques). In the materials section, the extensive "Material Selection Guide" and a "Material Database" take the reader through the selection of appropriate materials for the task at hand. The processes section of the book is organized as a catalog of microfabrication processes. Each entry contains a brief introduction to the technology, as well as examples of common uses in MEMS. The effects of processing conditions on material properties are covered where applicable, illustrating the interdependence and multidisciplinary nature of MEMS fabrication. There are also chapters on general MEMS design and MEMS process integration.

Unique feature: step-by-step fabrication recipes, tricks, arts and secrets

Not only does the book provide the reader with a broad understanding of materials and processes basics, it also gives practical insight into the daily workings and standard procedures carried out in research labs and production facilities.

As a particularly diverse and multidisciplinary field of research, MEMS presents a vast set of challenges relative to typical integrated circuit fabrication and design. While a wealth of knowledge exists in the MEMS community, much of it is accessed by informal, non-methodological means such as discussions with colleagues at conferences. Currently, researchers must spend valuable time on characterization runs and developing in-house recipes and specific processes to develop and manufacture MEMS structures, each time at the risk of wasting research efforts and "reinventing the wheel."

The handbook addresses this issue for the first time by including case studies at the end of each chapter with step-by-step examples and recipes prepared by seasoned MEMS experts. Readers will benefit from the identification and explanation of MEMS fabrication tricks, arts and secrets.

"The most important aspect of MEMS activities is the choice of materials, processes, integration and fabrication of complex homogenous, heterogeneous and hybrid structures," co-editor Ghodssi says. "In addition to introducing the reader to micro/nano fabrication and materials, we have designed the book to emphasize the most difficult and practical issues researchers experience in the lab but often are hesitant to share with their colleagues at conferences and in publications."


'/>"/>

Contact: Joan Robinson
joan.robinson@springer.com
49-622-148-78130
Springer
Source:Eurekalert

Related biology technology :

1. Search for advanced materials aided by discovery of hidden symmetries in nature
2. MIT engineers devise new way to inspect materials used in airplanes
3. Only the weak survive?: Pitt team adds more give for stronger self-healing materials
4. Argentum Medical Issues Response to Recent Decision in Litigation With Noble Biomaterials
5. Rutgers researchers identify materials that may deliver more bounce
6. Reportlinker Adds Global Biocompatible Materials Industry
7. New nanomaterials unlock new electronic and energy technologies
8. New materials may bring advanced optical technologies, cloaking
9. Carbon-Based Nano-Materials and Devices Conference
10. Nanomechanical Testing in Materials Research and Development
11. Strange new twist: Berkeley researchers discover Möbius symmetry in metamaterials
Post Your Comments:
*Name:
*Comment:
*Email:
(Date:6/23/2016)... , June 23, 2016 Houston Methodist ... the Cy-Fair Sports Association to serve as their ... agreement, Houston Methodist Willowbrook will provide sponsorship support, ... connectivity with association coaches, volunteers, athletes and families. ... the Cy-Fair Sports Association and to bring Houston ...
(Date:6/23/2016)... Prostate Cancer Foundation (PCF) is pleased to announce 24 new Young Investigator ... Members of the Class of 2016 were selected from a pool of 128 ... About the Class of 2016 PCF Young Investigators ... ... ...
(Date:6/23/2016)... FRANCISCO , June 23, 2016   EpiBiome ... has secured $1 million in debt financing from Silicon ... ramp up automation and to advance its drug development ... its new facility. "SVB has been an ... beyond the services a traditional bank would provide," said ...
(Date:6/23/2016)... ... ... STACS DNA Inc., the sample tracking software company, today announced that Dr. Hays ... DNA as a Field Application Specialist. , “I am thrilled that Dr. Young ... DNA. “In further expanding our capacity as a scientific integrator, Hays brings a wealth ...
Breaking Biology Technology:
(Date:6/22/2016)... 22, 2016 On Monday, the Department of ... to share solutions for the Biometric Exit Program. The ... Border Protection (CBP), explains that CBP intends to add ... the United States , in order to ... imposters. Logo - http://photos.prnewswire.com/prnh/20160622/382209LOGO ...
(Date:6/16/2016)... The global Biometric ... USD 1.83 billion by 2024, according to a ... proliferation and increasing demand in commercial buildings, consumer ... the market growth.      (Logo: ... of advanced multimodal techniques for biometric authentication and ...
(Date:6/9/2016)... , June 9, 2016 ... deploy Teleste,s video security solution to ensure the safety of ... during the major tournament Teleste, an ... systems and services, announced today that its video security solution ... to back up public safety across the country. The ...
Breaking Biology News(10 mins):