Navigation Links
MEMS Materials and Processes Handbook -- a comprehensive, practical resource

Academic and industrial research scientists and engineers, as well as students working in micro-electromechanical systems (MEMS), commonly encounter a steep learning curve when developing common MEMS fabrication processes. A fundamental, comprehensive MEMS-focused reference book just published by Springer promises to be an important game-changing asset for the field.

The new MEMS Materials and Processes Handbook is an exhaustive design reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. It will be valuable for seasoned researchers and engineers as well as students and other newcomers working in MEMS and materials processing.

The handbook is co-edited by Reza Ghodssi, Director of the Institute for Systems Research and Herbert Rabin Distinguished Professor in the Department of Electrical and Computer Engineering at the University of Maryland, College Park, Md.; and Pinyen Lin, Chief Technologist and Vice President of Business Development, Touch Micro-System Technology Corp. Taoyuan, Taiwan. It features 35 international contributing authors who are MEMS leaders in academic, industrial and government laboratory settings.

The handbook's content is separated into two distinct sections on materials and processes (fabrication techniques). In the materials section, the extensive "Material Selection Guide" and a "Material Database" take the reader through the selection of appropriate materials for the task at hand. The processes section of the book is organized as a catalog of microfabrication processes. Each entry contains a brief introduction to the technology, as well as examples of common uses in MEMS. The effects of processing conditions on material properties are covered where applicable, illustrating the interdependence and multidisciplinary nature of MEMS fabrication. There are also chapters on general MEMS design and MEMS process integration.

Unique feature: step-by-step fabrication recipes, tricks, arts and secrets

Not only does the book provide the reader with a broad understanding of materials and processes basics, it also gives practical insight into the daily workings and standard procedures carried out in research labs and production facilities.

As a particularly diverse and multidisciplinary field of research, MEMS presents a vast set of challenges relative to typical integrated circuit fabrication and design. While a wealth of knowledge exists in the MEMS community, much of it is accessed by informal, non-methodological means such as discussions with colleagues at conferences. Currently, researchers must spend valuable time on characterization runs and developing in-house recipes and specific processes to develop and manufacture MEMS structures, each time at the risk of wasting research efforts and "reinventing the wheel."

The handbook addresses this issue for the first time by including case studies at the end of each chapter with step-by-step examples and recipes prepared by seasoned MEMS experts. Readers will benefit from the identification and explanation of MEMS fabrication tricks, arts and secrets.

"The most important aspect of MEMS activities is the choice of materials, processes, integration and fabrication of complex homogenous, heterogeneous and hybrid structures," co-editor Ghodssi says. "In addition to introducing the reader to micro/nano fabrication and materials, we have designed the book to emphasize the most difficult and practical issues researchers experience in the lab but often are hesitant to share with their colleagues at conferences and in publications."


Contact: Joan Robinson

Related biology technology :

1. Search for advanced materials aided by discovery of hidden symmetries in nature
2. MIT engineers devise new way to inspect materials used in airplanes
3. Only the weak survive?: Pitt team adds more give for stronger self-healing materials
4. Argentum Medical Issues Response to Recent Decision in Litigation With Noble Biomaterials
5. Rutgers researchers identify materials that may deliver more bounce
6. Reportlinker Adds Global Biocompatible Materials Industry
7. New nanomaterials unlock new electronic and energy technologies
8. New materials may bring advanced optical technologies, cloaking
9. Carbon-Based Nano-Materials and Devices Conference
10. Nanomechanical Testing in Materials Research and Development
11. Strange new twist: Berkeley researchers discover Möbius symmetry in metamaterials
Post Your Comments:
(Date:6/27/2016)... -- Alex,s Lemonade Stand Foundation (ALSF), a leading national childhood ... state-of-the-art bioinformatics lab, using ,big data, to advance the ... Liz Scott , co-executive director of ALSF and ... Washington, D.C. , hosted by Vice ... of pediatric cancer research and awareness. ...
(Date:6/27/2016)... 2016  Global demand for enzymes is forecast ... to $7.2 billion.  This market includes enzymes used ... biofuel production, animal feed, and other markets) and ... Food and beverages will remain the largest market ... of products containing enzymes in developing regions.  These ...
(Date:6/27/2016)... , June 27, 2016 /PRNewswire/ - BIOREM Inc. (TSX-V: BRM) ... advised by its major shareholders, Clean Technology Fund I, ... United States based venture capital funds which ... Biorem (on a fully diluted, as converted basis), that ... of their entire equity holdings in Biorem to TUS ...
(Date:6/27/2016)... 2016  Sequenom, Inc. (NASDAQ: SQNM ), ... through the development of innovative products and services, announced ... United States denied its petition to review ... Sequenom,s U.S. Patent No. 6,258,540 (",540 Patent") are not ... the Supreme Court,s Mayo Collaborative Services v. Prometheus Laboratories ...
Breaking Biology Technology:
(Date:6/21/2016)... , June 21, 2016 NuData ... the new role of principal product architect and ... the director of customer development. Both will report ... technical officer. The moves reflect NuData,s strategic growth ... response to high customer demand and customer focus ...
(Date:6/16/2016)... The global Biometric ... USD 1.83 billion by 2024, according to a ... proliferation and increasing demand in commercial buildings, consumer ... the market growth.      (Logo: ... of advanced multimodal techniques for biometric authentication and ...
(Date:6/9/2016)... control systems is proud to announce the introduction of fingerprint attendance control software, allowing ... are actually signing in, and to even control the opening of doors. ... ... ... Photo - ...
Breaking Biology News(10 mins):